ISO 16413:2020-ed.2.0

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

STANDARD published on 14.8.2020

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The information about the standard:

Designation standards: ISO 16413:2020-ed.2.0
Publication date standards: 14.8.2020
The number of pages: 32
Approximate weight : 96 g (0.21 lbs)
Country: International technical standard
Category: Technical standards ISO