ISO 18114:2021-ed.2.0

Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials

STANDARD published on 11.5.2021

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The information about the standard:

Designation standards: ISO 18114:2021-ed.2.0
Publication date standards: 11.5.2021
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: International technical standard
Category: Technical standards ISO

Annotation of standard text ISO 18114:2021-ed.2.0 :

Description / Abstract: This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials. The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.