ISO 18115-3:2022

Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis

STANDARD published on 30.6.2022

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The information about the standard:

Designation standards: ISO 18115-3:2022
Publication date standards: 30.6.2022
The number of pages: 35
Approximate weight : 105 g (0.23 lbs)
Country: International technical standard
Category: Technical standards ISO

Annotation of standard text ISO 18115-3:2022 :

Description / Abstract: This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.