ISO 18516:2019-ed.2.0

Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres

STANDARD published on 14.1.2019

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The information about the standard:

Designation standards: ISO 18516:2019-ed.2.0
Publication date standards: 14.1.2019
The number of pages: 53
Approximate weight : 159 g (0.35 lbs)
Country: International technical standard
Category: Technical standards ISO