ISO 20341:2003

Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials

STANDARD published on 24.7.2003

English -
electronic design (pdf) (66.90 USD)

English -

Print design (66.90 USD)

The information about the standard:

Designation standards: ISO 20341:2003
Publication date standards: 24.7.2003
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: International technical standard
Category: Technical standards ISO

Annotation of standard text ISO 20341:2003 :

Description / Abstract: ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials. It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.