ISO 25164:2026

Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification

STANDARD published on 3.8.2026

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The information about the standard:

Designation standards: ISO 25164:2026
Publication date standards: 3.8.2026
The number of pages: 6
Approximate weight : 18 g (0.04 lbs)
Country: International technical standard
Category: Technical standards ISO

Annotation of standard text ISO 25164:2026 :

Description / Abstract: This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering. This document is also applicable to the deposition of TiN, TiAlN or TiSiN thin films.