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ISO/TR 19319:2013-ed.2.0

Surface chemical analysis — Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

STANDARD published on 6.3.2013

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The information about the standard:

Designation standards: ISO/TR 19319:2013-ed.2.0
Publication date standards: 6.3.2013
The number of pages: 116
Approximate weight : 379 g (0.84 lbs)
Country: International technical standard
Category: Technical standards ISO

Annotation of standard text ISO/TR 19319:2013-ed.2.0 :

Description / Abstract: ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.