ISO/TS 22933:2022

Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

STANDARD published on 1.4.2022

English -
electronic design (pdf) (150.10 USD)

The information about the standard:

Designation standards: ISO/TS 22933:2022
Publication date standards: 1.4.2022
The number of pages: 15
Approximate weight : 45 g (0.10 lbs)
Country: International technical standard
Category: Technical standards ISO

Annotation of standard text ISO/TS 22933:2022 :

Description / Abstract: This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.