ISO 16700:2016-ed.2.0

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

STANDARD published on 18.7.2016

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The information about the standard:

Designation standards: ISO 16700:2016-ed.2.0
Publication date standards: 18.7.2016
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: International technical standard
Category: Technical standards ISO

Annotation of standard text ISO 16700:2016-ed.2.0 :

Description / Abstract: ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.