JIS C5630-12:2014

Semiconductor devices -- Micro-electromechanical devices -- Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures

STANDARD published on 20.2.2014

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The information about the standard:

Designation standards: JIS C5630-12:2014
Publication date standards: 20.2.2014
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: Other standards
Category: Technical standards JIS