
Semiconductor devices -- Micro-electromechanical devices-- Part 2: Tensile testing method of thin film materials
STANDARD published on 20.3.2009
Designation standards: JIS C5630-2:2009
Publication date standards: 20.3.2009
The number of pages: 10
Approximate weight : 30 g (0.07 lbs)
Country: Other standards
Category: Technical standards JIS