
Semiconductor devices -- Micro-electromechanical devices -- Part 26: Description and measurement methods for micro trench and needle structures
STANDARD published on 20.10.2017
Designation standards: JIS C5630-26:2017
Publication date standards: 20.10.2017
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: Other standards
Category: Technical standards JIS