JIS C5630-30:2020

Semiconductor devices -- Micro-electromechanical devices -- Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

STANDARD published on 23.3.2020

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The information about the standard:

Designation standards: JIS C5630-30:2020
Publication date standards: 23.3.2020
The number of pages: 16
Approximate weight : 48 g (0.11 lbs)
Country: Other standards
Category: Technical standards JIS