
Semiconductor devices -- Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials
STANDARD published on 22.8.2011
Designation standards: JIS C5630-6:2011
Publication date standards: 22.8.2011
The number of pages: 12
Approximate weight : 36 g (0.08 lbs)
Country: Other standards
Category: Technical standards JIS