JIS K0148:2005

Surface chemical analysis -- Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

STANDARD published on 20.3.2005

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The information about the standard:

Designation standards: JIS K0148:2005
Publication date standards: 20.3.2005
The number of pages: 26
Approximate weight : 78 g (0.17 lbs)
Country: Other standards
Category: Technical standards JIS

Annotation of standard text JIS K0148:2005 :

Japanese Errata (200510)