STN EN 62047-16 (358792)

Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films ÔÇô Wafer curvature and cantilever beam deflection methods

STANDARD published on 1.12.2015

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The information about the standard:

Designation standards: STN EN 62047-16
Classification mark: 358792
Catalog number: 121888
Publication date standards: 1.12.2015
Approximate weight : 30 g (0.07 lbs)
Country: Slovak technical standard
Category: Technical standards STN