Semiconductor devices - Micro-electromechanical devices Part 1: Terms and definitions
STANDARD published on 1.6.2007
Designation standards: STN EN 62047-1
Classification mark: 358792
Catalog number: 103751
Note: WITHDRAWN
Publication date standards: 1.6.2007
The number of pages: 31
Approximate weight : 93 g (0.21 lbs)
Country: Slovak technical standard
Category: Technical standards STN