STN EN 62047-17 (358792)

Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films

STANDARD published on 1.12.2015

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The information about the standard:

Designation standards: STN EN 62047-17
Classification mark: 358792
Catalog number: 121889
Publication date standards: 1.12.2015
Approximate weight : 51 g (0.11 lbs)
Country: Slovak technical standard
Category: Technical standards STN