STN EN 62047-21 (358792)

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson´s ratio of thin film MEMS materials

STANDARD published on 1.2.2015

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The information about the standard:

Designation standards: STN EN 62047-21
Classification mark: 358792
Catalog number: 120055
Publication date standards: 1.2.2015
Approximate weight : 30 g (0.07 lbs)
Country: Slovak technical standard
Category: Technical standards STN