Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (Endorsed by AENOR in November of 2013.)
STANDARD published on 1.11.2013
Designation standards: UNE-EN 62047-11:2013
Publication date standards: 1.11.2013
The number of pages: 23
Approximate weight : 69 g (0.15 lbs)
Country: Spanish technical standard
Category: Technical standards UNE