Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (Endorsed by AENOR in February of 2012.)
STANDARD published on 1.2.2012
Designation standards: UNE-EN 62047-12:2011
Publication date standards: 1.2.2012
The number of pages: 33
Approximate weight : 99 g (0.22 lbs)
Country: Spanish technical standard
Category: Technical standards UNE