Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures (Endorsed by AENOR in June of 2012.)
STANDARD published on 1.6.2012
Designation standards: UNE-EN 62047-13:2012
Publication date standards: 1.6.2012
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: Spanish technical standard
Category: Technical standards UNE