Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films – Wafer curvature and cantilever beam deflection methods (Endorsed by AENOR in August of 2015.)
STANDARD published on 1.8.2015
Designation standards: UNE-EN 62047-16:2015
Publication date standards: 1.8.2015
The number of pages: 15
Approximate weight : 45 g (0.10 lbs)
Country: Spanish technical standard
Category: Technical standards UNE