UNE-EN 62047-21:2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson´s ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.)

STANDARD published on 1.11.2014

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The information about the standard:

Designation standards: UNE-EN 62047-21:2014
Publication date standards: 1.11.2014
The number of pages: 17
Approximate weight : 51 g (0.11 lbs)
Country: Spanish technical standard
Category: Technical standards UNE