Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area (Endorsed by Asociación Espanola de Normalización in January of 2017.)
STANDARD published on 1.1.2017
Designation standards: UNE-EN 62047-25:2016
Publication date standards: 1.1.2017
The number of pages: 31
Approximate weight : 93 g (0.21 lbs)
Country: Spanish technical standard
Category: Technical standards UNE