Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (Endorsed by AENOR in June of 2016.)
STANDARD published on 1.6.2016
Designation standards: UNE-EN 62047-26:2016
Publication date standards: 1.6.2016
The number of pages: 35
Approximate weight : 105 g (0.23 lbs)
Country: Spanish technical standard
Category: Technical standards UNE