
Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials (Endorsed by AENOR in June of 2010.)
STANDARD published on 1.6.2010
Designation standards: UNE-EN 62047-6:2010
Publication date standards: 1.6.2010
The number of pages: 19
Approximate weight : 57 g (0.13 lbs)
Country: Spanish technical standard
Category: Technical standards UNE