UNE-EN 62047-9:2011

Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS (Endorsed by AENOR in June of 2012.)

STANDARD published on 1.6.2012

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The information about the standard:

Designation standards: UNE-EN 62047-9:2011
Publication date standards: 1.6.2012
The number of pages: 29
Approximate weight : 87 g (0.19 lbs)
Country: Spanish technical standard
Category: Technical standards UNE