Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications.
STANDARD published on 1.1.2009
Designation standards: VDI 2083Blatt13.2
Publication date standards: 1.1.2009
The number of pages: 52
Approximate weight : 156 g (0.34 lbs)
Country: German technical standard
Category: Technical standards VDI
Reinraumtechnik - Qualität, Erzeugung und Verteilung von Reinstwasser - Mikroelektronik und andere technische Anwendungen.