Cleanrooms and associated controlled environments. Part 12. Specifications for monitoring air cleanliness b nanoscale particle concentration

Standard published on 1.12.2020

Cleanrooms and associated controlled environments. Part 14. Assessment of suitability for use of equipment by airborne particle concentration

Standard published on 1.1.2024

Cleanrooms and associated controlled environments. Part 16. Energy efficiency in cleanrooms and clean air devices

Standard published on 1.1.2024

Cleanrooms and associated controlled environments. Part 18. Assessment of suitability of consumables

Standard published on 1.7.2026

Cleanrooms and associated controlled environments. Part 2. Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

Standard published on 1.12.2020

Cleanrooms and associated controlled environments. Part 3. Test methods

Standard published on 1.9.2021

Cleanrooms and associated controlled environments. Part 4. Design, construction and start-up

Standard published on 1.11.2025

Cleanrooms and associated controlled environments. Part 5. Operation

Standard published on 1.7.2026

Cleanrooms and associated controlled environments. Part 6. Vocabulary

Standard published on 1.12.2011

Cleanrooms and associated controlled environments. Part 7. Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)

Standard published on 1.1.2008