Cleanrooms and associated controlled environments. Part 5: Operations

Standard published on 1.8.2026

Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) (ISO 14644-7:2004)

Standard published on 1.4.2005

Cleanrooms and associated controlled environments - Part 8: Assessment of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2022)

Standard published on 1.10.2022

Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)

Standard published on 1.9.2022

Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)

Standard published on 1.9.2022

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration (ISO 14644-13:2026)

Standard published on 1.7.2026

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2026)

Standard published on 1.7.2026

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)

Standard published on 1.6.2018

Čisté priestory a príslušné riadené prostredie. Časť 15: Posudzovanie vhodnosti zariadení a materiálov pre čisté priestory podľa chemickej koncentrácie vo vzduchu (ISO 14644-15: 2026) (Norma na priame používanie ako STN).

Standard published on 1.9.2026

Cleanrooms and associated controlled environments - Part 16: Energy efficiency in cleanrooms and separative devices (ISO 14644-16:2019)

Standard published on 1.12.2019