Standards STN - Slovak standards - Page 807

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration (ISO 14644-13:2026)

Standard published on 1.7.2026

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2026)

Standard published on 1.7.2026

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2026)

Standard published on 1.9.2026

Cleanrooms and associated controlled environments - Part 16: Energy efficiency in cleanrooms and separative devices (ISO 14644-16:2019)

Standard published on 1.12.2019

Cleanrooms and associated controlled environments - Part 17: Particle deposition rate applications (ISO 14644-17:2021)

Standard published on 1.8.2021

Cleanrooms and associated controlled environments - Part 18: Assessment of suitability of consumables (ISO 14644-18:2023)

Standard published on 1.3.2024

Cleanrooms and associated controlled environments. Part 1: Classification of air cleanliness (ISO 14644-1:1999)

WITHDRAWN published on 1.11.2001

Cleanrooms and associated controlled environments. Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1 (ISO 14644-2:2000)

WITHDRAWN published on 1.11.2001

Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2005)

WITHDRAWN published on 1.6.2006

Cleanrooms and associated controlled environments. Part 4: Design, construction and start-up (ISO 14644-4:2001)

WITHDRAWN published on 1.11.2001