Standards UNE - Spanish national standards - Page 656

Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)

Standard published on 30.11.2022

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017)

Standard published on 19.12.2018

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)

Standard published on 12.7.2017

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)

Standard published on 19.12.2018

Cleanrooms and associated controlled environments - Part 16: Energy efficiency in cleanrooms and separative devices (ISO 14644-16:2019)

Standard published on 9.12.2020

Cleanrooms and associated controlled environments - Part 17: Particle deposition rate applications (ISO 14644-17:2021)

Standard published on 30.6.2021

Cleanrooms and associated controlled environments - Part 18: Assessment of suitability of consumables (ISO 14644-18:2023)

Standard published on 29.5.2024

Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015)

Standard published on 8.11.2016

Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2019, Corrected version 2020-06)

Standard published on 24.3.2021

Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up (ISO 14644-4:2022)

Standard published on 15.11.2023