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Standard Practice for Scanning Electron Microscope Beam Size Characterization
STANDARD published on 10.10.1997
Designation standards: ASTM E986-97
Note: WITHDRAWN
Publication date standards: 10.10.1997
SKU: NS-48703
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
edge sharpness, electron beam size, E 766, graphite fiber, magnification, NIST-SRM 2069B, performance, SEM, specimen interaction, waveform, ICS Number Code 31.120 (Electronic display devices), 37.020 (Optical equipment)
1. Scope | ||||
1.1 This practice provides a reproducible means by which the performance of a scanning electron microscope (SEM) may be characterized. This performance is a measure of the SEM-operator-material combination and is quantified through the measurement of an effective "apparent edge sharpness" for a number of materials, two of which are suggested. This practice requires an SEM with the capability to perform line-scan traces (for example, -deflection waveform generation) for the suggested materials. The range of SEM magnification at which this practice is of utility is from 1000 to 200 000 X. 1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. |
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2. Referenced Documents | ||||
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