We need your consent to use the individual data so that you can see information about your interests, among other things. Click "OK" to give your consent.
Standard Guide for Application of Silicon Standard Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon
STANDARD published on 10.6.2000
Designation standards: ASTM F1527-00
Note: WITHDRAWN
Publication date standards: 10.6.2000
SKU: NS-50636
The number of pages: 15
Approximate weight : 45 g (0.10 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
Calibration-semiconductor analysis instrumentation, Control chart, Eddy current gage, Four-point probe method, Mercury probe, Probe methods-four-point probe, Probe methods-spreading resistance probe, Reference materials (RM), Resistance (electrical)-semiconductors, Resistivity reference wafer, Sheet resistance, Silicon semiconductors, Silicon semiconductors-slices/wafers, SPC, Spreading resistance probe, Standard reference materials (SRM)
1. Scope |
1.1 This guide covers the application of Standard Reference Materials (SRMs ) for resistivity measurements on silicon wafers. Specifically, this guide covers the use of these SRMs for preparing resistivity reference wafers and for ensuring the quality of the instrumentation used for preparing them. 1.2 This guide has not been evaluated for application to electronic materials other than silicon. 1.3 The guide covers the selection of materials for resistivity reference wafers, procedures for preparing and calibrating resistivity reference wafers, and use of resistivity reference wafers in qualifying, calibrating, and controlling various types of resistivity instrumentation. 1.4 The guide provides criteria for selection of instruments for determining the resistivity of silicon resistivity reference materials, procedures for maintaining such instruments in statistical quality control, and training requirements for operators engaged in making and using resistivity reference wafers. 1.5 Appendixes are included that cover (1) suggested control charting procedures for organizations that do not already have such procedures in place, and (2) errors in resistivity determination that result from uncertainties in wafer diameter, wafer thickness, and probe-tip spacing. 1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. |
Do you want to make sure you use only the valid technical standards?
We can offer you a solution which will provide you a monthly overview concerning the updating of standards which you use.
Would you like to know more? Look at this page.
Latest update: 2025-07-09 (Number of items: 2 207 504)
© Copyright 2025 NORMSERVIS s.r.o.