ASTM F1527-00

Standard Guide for Application of Silicon Standard Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon



STANDARD published on 10.6.2000


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The information about the standard:

Designation standards: ASTM F1527-00
Note: WITHDRAWN
Publication date standards: 10.6.2000
SKU: NS-50636
The number of pages: 15
Approximate weight : 45 g (0.10 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1527-00 :

Keywords:

Calibration-semiconductor analysis instrumentation, Control chart, Eddy current gage, Four-point probe method, Mercury probe, Probe methods-four-point probe, Probe methods-spreading resistance probe, Reference materials (RM), Resistance (electrical)-semiconductors, Resistivity reference wafer, Sheet resistance, Silicon semiconductors, Silicon semiconductors-slices/wafers, SPC, Spreading resistance probe, Standard reference materials (SRM)

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