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Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum by High Mass-Resolution Glow-Discharge Mass Spectrometer
STANDARD published on 10.6.1997
Designation standards: ASTM F1593-97
Note: WITHDRAWN
Publication date standards: 10.6.1997
SKU: NS-50854
The number of pages: 6
Approximate weight : 18 g (0.04 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
aluminum, electronics, glow discharge mass spectrometer (GDMS), purity analysis, sputtering target, trace metallic impurities
1. Scope | ||||||||
1.1 This test method covers measuring the concentrations of trace metallic impurities in high purity aluminum. 1.2 This test method pertains to analysis by magnetic-sector glow discharge mass spectrometer (GDMS). 1.3 The aluminum matrix must be 99.9 weight % (3N-grade) pure, or purer, with respect to metallic impurities. There must be no major alloy constituent, for example, silicon or copper, greater than 1000 weight ppm in concentration. 1.4 This test method does not include all the information needed to complete GDMS analyses. Sophisticated computer-controlled laboratory equipment skillfully used by an experienced operator is required to achieve the required sensitivity. This test method does cover the particular factors (for example, specimen preparation, setting of relative sensitivity factors, determination of sensitivity limits, etc.) known by the responsible technical committee to affect the reliability of high purity aluminum analyses. |
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2. Referenced Documents | ||||||||
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