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  4. Standard "ASTM F1709-97"
WITHDRAWN ASTM F1709-97 1.1.1996 preview

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ASTM F1709-97

Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications



STANDARD published on 1.1.1996


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The information about the standard:

Designation standards: ASTM F1709-97
Note: WITHDRAWN
Publication date standards: 1.1.1996
SKU: NS-51257
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Category: Technical standards ASTM

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Annotation of standard text ASTM F1709-97 :

Keywords:

ICS Number Code 31.120 (Electronic display devices)

Additional information

 
1. Scope

1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.
 
2. Referenced Documents

E112-13(2021)

Standard Test Methods for Determining Average Grain Size

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