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Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
STANDARD published on 1.1.1996
Designation standards: ASTM F1709-97
Note: WITHDRAWN
Publication date standards: 1.1.1996
SKU: NS-51257
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
ICS Number Code 31.120 (Electronic display devices)
| 1. Scope | ||
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1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices. 1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging. |
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| 2. Referenced Documents | ||
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