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Test Method for Detection of Oxidation Induced Defects in Polished Silicon Wafers (Withdrawn 1998)
Designation standards: ASTM F416-94
Note: WITHDRAWN
SKU: NS-55222
The number of pages: 11
Approximate weight : 33 g (0.07 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
ICS Number Code 29.045 (Semiconducting materials)
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