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  4. Standard "ASTM F907-85E01R92"
WITHDRAWN ASTM F907-85E01R92 1.1.1996 preview

ASTM F907-85E01R92

Test Method for Measurement of Rotational Acceleration of a Wafer for Photoresist Spin Coating

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STANDARD published on 1.1.1996


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The information about the standard:

Designation standards: ASTM F907-85E01R92
Note: WITHDRAWN
Publication date standards: 1.1.1996
SKU: NS-1032959
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

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