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Standard BS EN 62047-16:2015 31.7.2015 preview

BS EN 62047-16:2015

Semiconductor devices. Micro-electromechanical devices. Test methods for determining residual stresses of MEMS films. Wafer curvature and cantilever beam deflection methods.



STANDARD published on 31.7.2015


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Price214.40 USD excl. VAT
214.40 USD

The information about the standard:

Designation standards: BS EN 62047-16:2015
Publication date standards: 31.7.2015
SKU: NS-611421
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: British technical standard
Category: Technical standards BS

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The category - similar standards:

Other semiconductor devices

Annotation of standard text BS EN 62047-16:2015 :

ISBN: 978 0 580 78080 6 Status: Definitive

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