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Semiconductor devices. Micro-electromechanical devices. Bulge test method for measuring mechanical properties of thin films.
STANDARD published on 31.7.2015
Designation standards: BS EN 62047-17:2015
Publication date standards: 31.7.2015
SKU: NS-611422
The number of pages: 34
Approximate weight : 102 g (0.22 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 580 72203 5 Status: Definitive
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