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Semiconductor devices. Micro-electromechanical devices. Description and measurement methods for micro trench and needle structures.
Translate name
STANDARD published on 31.5.2016
Designation standards: BS EN 62047-26:2016
Publication date standards: 31.5.2016
SKU: NS-638282
The number of pages: 34
Approximate weight : 102 g (0.22 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 580 85309 8 Status: Under Review
Latest update: 2026-10-29 (Number of items: 2 208 109)
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