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Semiconductor devices. Micro-electromechanical devices. Generic specification for MEMS.
STANDARD published on 30.11.2010
Designation standards: BS EN 62047-4:2010
Publication date standards: 30.11.2010
SKU: NS-98857
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 580 56857 2 Status: Definitive
Latest update: 2026-10-29 (Number of items: 2 208 109)
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