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Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices. Test method for defects using photoluminescence.
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STANDARD published on 24.7.2020
Designation standards: BS IEC 63068-3:2020
Publication date standards: 24.7.2020
SKU: NS-999494
The number of pages: 28
Approximate weight : 84 g (0.19 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 539 02136 3 Status: Definitive
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