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Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy.
STANDARD published on 15.5.2001
Designation standards: BS ISO 14706:2000
Note: WITHDRAWN
Publication date standards: 15.5.2001
SKU: NS-110649
The number of pages: 32
Approximate weight : 96 g (0.21 lbs)
Country: British technical standard
Category: Technical standards BS
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