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Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy.
STANDARD published on 31.7.2014
Designation standards: BS ISO 14706:2014
Publication date standards: 31.7.2014
SKU: NS-110650
The number of pages: 36
Approximate weight : 108 g (0.24 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 580 82725 9 Status: Under Review
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