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Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment.
Translate name
STANDARD published on 19.6.2019
Designation standards: BS ISO 21859:2019
Publication date standards: 19.6.2019
SKU: NS-952396
The number of pages: 12
Approximate weight : 36 g (0.08 lbs)
Country: British technical standard
Category: Technical standards BS
ISBN: 978 0 580 96201 1 Status: Confirmed
Latest update: 2026-08-28 (Number of items: 2 298 625)
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