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Standard ČSN EN 62047-10 1.3.2012 preview

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ČSN EN 62047-10 (358775)

Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials



STANDARD published on 1.3.2012


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The information about the standard:

Designation standards: ČSN EN 62047-10
Classification mark: 358775
Catalog number: 90140
Publication date standards: 1.3.2012
SKU: NS-161577
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: Czech technical standard
Category: Technical standards ČSN

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Other semiconductor devices

Annotation of standard text ČSN EN 62047-10 (358775):

Tato část IEC 62047 specifikuje zkušební metodu pro měření tlakových vlastností pomocí tlaku mikrosloupku. Metoda má vysokou přesnost, opakovatelnost a zkušební vzorek je snadno vyrobitelný. Měří se vztah napětí a deformace vzorku působící mimo jeho osu a stanovuje se tlakový modul pružnosti a mez tečení. Zkušebním přípravkem je válcový sloupek vyrobený z neohebného (velmi tuhého) substrátu určeného pro mikrostrojní technologie. Poměr průměru a výšky sloupku by měl být více jak 3. Tato norma se může použít pro kovové, keramické a polymerní materiály

These corrections apply to this standard:

Preview ČSN EN 62047-10:2012/Oprava1 1.7.2012
ČSN EN 62047-10:2012/Oprava1 (358775) Correction

Polovodičové součástky - Mikroelektromechanické součástky - Část 10: Zkouška tlakem mikrosloupku pro materiály MEMS. (Norma přebírající anglický originál, vlastní text je součástí výtisku).

Correction published on 1.7.2012

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Preview of the standard ČSN EN 62047-10 (358775)

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