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Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration
Translate name
STANDARD published on 1.11.2022
Designation standards: ČSN EN ISO 14644-9
Classification mark: 125301
Catalog number: 515523
Publication date standards: 1.11.2022
SKU: NS-1088351
The number of pages: 40
Approximate weight : 120 g (0.26 lbs)
Country: Czech technical standard
Category: Technical standards ČSN
This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D.
This document applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The procedure for the assessment of surface cleanliness by particle concentration (SCP) is limited to particles of between 0,05 µm and 500 µm.
The following issues are not considered in this document:
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Latest update: 2026-05-21 (Number of items: 2 279 758)
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