ČSN EN ISO 23131 (039050)

Ellipsometry - Principles

Translate name

STANDARD published on 1.4.2023


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The information about the standard:

Designation standards: ČSN EN ISO 23131
Classification mark: 039050
Catalog number: 516600
Publication date standards: 1.4.2023
SKU: NS-1137387
The number of pages: 28
Approximate weight : 84 g (0.19 lbs)
Country: Czech technical standard
Category: Technical standards ČSN

The category - similar standards:

Metrology and measurement in general

Annotation of standard text ČSN EN ISO 23131 (039050):

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3

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